Polysilicon -
silicon with randomly orientated grains where each grain is made up of crystalline sili
con.
silicide-
a compound of metal and silicon. Silicides may be easily formed by thermally reactin
g a variety of metal with silicon and are widely used as contacts to silicon and conduct
ors.
Self Aligned Silicide -
a silicide process where an oxide or nitride layer with opening down to silicon is used
to allow silicide to only form in selected areas.
在次微米技术中，为了克服所谓热载子(Hot-Carrier)问题而发展出LDD(Lightly-Doped Drain)制程与结构; 为了降低CMOS组件汲极(drain)与源极(source)的寄生电阻(sheetresistance) Rs 与 Rd，而发展出Silicide制程; 为了降低 CMOS组件闸级的寄生电阻 Rg，而发展出 Polycide 制程 在更进步的制程中把Silicide 与 Polycide 一起制造，而发展出所谓Salicide 制程。
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polycide:降低栅极电阻
silicide：降低源漏电阻
salicide：既能降低栅极电阻，又能降低源漏电阻
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